| 1 | DC magnetron sputtering으로 증착한 Cr 산화물 박막의 두께 균일도 및 광학적인 특성 분석 = Analysis on thickness uniformity and optical properties of chromium oxide thin films deposited by DC magnetron sputteringlink 홍승범; Hong, Seung-Bum; et al, 한국과학기술원, 1996 |
| 2 | ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구 = Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputteringlink 김성태; Kim, Sung-Tae; et al, 한국과학기술원, 1997 |
| 3 | Effect of Annealing Temperature on the Interfacial Interaction of LiNi0.5Mn1.5O4 Thin Film Cathode with Stainless-Steel Substrate Kim, Jong Heon; Park, Jozeph; Park, Kyung; Cho, Su-Ho; Park, Yun Chang; Kim, Chunjoong; Kim, Il-Doo; et al, JOURNAL OF ELECTROCERAMICS, v.42, no.3-4, pp.104 - 112, 2019-06 |
| 4 | Growth and characterization of Cu2ZnSnSe4 (CZTSe) thin films by sputtering of binary selenides and its selenization = 스퍼터링법으로 증착한 이원계 셀레나이드 전구체와 이를 셀렌화한Cu2ZnSnSe4 (CZTSe) 박막의 성장 및 특성link Munir, Rahim; Munir Rahim; et al, 한국과학기술원, 2012 |
| 5 | Microstructural Characteristics of Tin Oxide-Based Thin Films on (0001) Al2O3 Substrates: Effects of Substrate Temperature and RF Power During Co-Sputtering Hwang, Sooyeon; Lee, Ju Ho; Kim, Young Yi; Yun, Myeong Goo; Lee, Kwan-Hun; Lee, JeongYong; Cho, Hyung Koun, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.14, no.12, pp.8908 - 8914, 2014-12 |
| 6 | Origin of residual stress and its relationship with crystallographic orientation of sputtered thin films = 스퍼터링법으로 증착한 박막의 잔류응력 생성 원인 및 결정 방향성과의 관계link Choi, Han-Mei; 최한메; et al, 한국과학기술원, 1999 |
| 7 | Reproducible resistance switching for BaTiO3 thin films fabricated by RF-magnetron sputtering Jung, Chang-Hwa; Woo, Seong-Ihl; Kim, Yun-Seok; No, Kwang-Soo, THIN SOLID FILMS, v.519, no.10, pp.3291 - 3294, 2011-03 |
| 8 | RFreactive sputtering법으로 제조한 탄성표면파 소자용 AlN:H 박막과 ZnO/AlN 이층박막의 특성에 관한 연구 = A study on the properties of AlN:H thin films and ZnO/AlN bilayered films prepared by RF reactive sputtering for the application of SAW deviceslink 용윤중; Yong, Yoon-Joong; et al, 한국과학기술원, 1997 |
| 9 | Straightforward strategy toward a shape-deformable carbon-free cathode for flexible Li–air batteries in ambient air Jung, Ji-Won; Nam, Jong Seok; Klyukin, Konstantin; Youn, Doo-Young; Kim, Il-Doo, NANO ENERGY, v.83, 2021-05 |
| 10 | Structural and electrical properties of Sb-doped p-type ZnO thin films fabricated by RF magnetron sputtering Kim, Dong-Hun; Cho, Nam-Gyu; Kim, Kyoung-Sun; Han, Seung-Ho; Kim, Ho Gi, JOURNAL OF ELECTROCERAMICS, v.22, no.1-3, pp.82 - 86, 2009-02 |
| 11 | Suppressed ionic contamination of LiNi0.5Mn1.5O4 with a Pt/ITO/stainless steel multilayer current collector Kim, Jong Heon; Park, Jozeph; Cheong, Jun Young; Song, Aeran; Chung, Kwun-Bum; Park, Yun Chang; Kim, Il-Doo; et al, CERAMICS INTERNATIONAL, v.44, no.16, pp.20093 - 20104, 2018-11 |
| 12 | Ta-N 박막의 Cu 확산방지 특성에 관한 연구 = A study on the barrier properties of Ta-n thin films against Cu diffusionlink 장유진; Chang, You-Jean; et al, 한국과학기술원, 1999 |
| 13 | Transparent thin-film transistors with zinc oxide semiconductor fabricated by reactive sputtering using metallic zinc target Cheong, Woo-Seok; Ryu, Min-Ki; Shin, Jae-heon; Park, Sang-Hee Ko; Hwang, Chi-Sun, THIN SOLID FILMS, v.516, no.22, pp.8159 - 8164, 2008-09 |
| 14 | 마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구 = Study on the target erosion and film deposition in magnetron sputtering systemlink 최선희; Choi, Sun-Hee; et al, 한국과학기술원, 2003 |
| 15 | 반응성 스퍼터링법에 의해 제조된 PZT 박막의 특성 평가와 압전형 미소기동기 제작에 관한 연구 = A study on the properties of PZT films prepared by reactive sputtering method and the fabrication of piezoelectric microactuatorlink 남효진; Nam, Hyo-Jin; et al, 한국과학기술원, 1998 |
| 16 | 반응성 스퍼터링법으로 제조한 $PbTiO_3$ 박막의 응력분포에 따른 배향성의 변화에 관한 연구 = A study on stress distribution dependence of orientation ratio in $PbTiO_3$ thin film deposited by reactive sputteringlink 최원경; Choi, Won-Kyung; et al, 한국과학기술원, 1997 |
| 17 | 수소첨가에 의한 ZnO 박막의 전도성과 투과율 향상에 관한 연구 = A study on the enhancement of conductivity and transmittance of zinc oxide thin films by hydrogen additionlink 강윤선; Kang, Youn-Seon; et al, 한국과학기술원, 1998 |
| 18 | 스퍼터링법으로 증착한 알루미늄 박막의 잔류응력에 따른 결정 배향성이 전기적성질에 미치는 영향 = Effect of crystallographic orientation affected by residual stress on electrical property of Al thin films deposited by sputteringlink 김석필; Kim, Suk-Pil; et al, 한국과학기술원, 1997 |
