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학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ v, 133 p. ]
탄성표면파; 산화아연/질화알루미늄; 수소화된 질화알루미늄; 스퍼터링; Sputtering; SAW; ZnO/AlN; AlN:H
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