Ta-N 박막의 Cu 확산방지 특성에 관한 연구A study on the barrier properties of Ta-n thin films against Cu diffusion
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 156254/325007 / 000973594
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.8, [ iv, 68 p. ]
- Keywords
확산방지막; 스퍼터링; 탄탈륨; 구리; Cu; Diffusion barrier; Sputtering; Ta-N
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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