Ta-N 박막의 Cu 확산방지 특성에 관한 연구 = A study on the barrier properties of Ta-n thin films against Cu diffusion

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Advisors
박종욱researcherPark, Chong-Ookresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1999
Identifier
156254/325007 / 000973594
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.8, [ iv, 68 p. ]

Keywords

확산방지막; 스퍼터링; 탄탈륨; 구리; Cu; Diffusion barrier; Sputtering; Ta-N

URI
http://hdl.handle.net/10203/50754
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=156254&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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