마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구Study on the target erosion and film deposition in magnetron sputtering system
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180282/325007 / 020013606
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 82 p. ]
- Keywords
스퍼터링; Sputtering
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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