반응성 스퍼터링법에 의해 제조된 PZT 박막의 특성 평가와 압전형 미소기동기 제작에 관한 연구A study on the properties of PZT films prepared by reactive sputtering method and the fabrication of piezoelectric microactuator
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 143454/325007 / 000945141
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ v, 171 p. ]
- Keywords
마이크로머시닝; 압전; 페롭스카이트; 스퍼터링; 미소기동기; Microactuator; Micromachining; Perovskite:Piezoelectric; Sputtering; PZT
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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