DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이원종 | - |
dc.contributor.advisor | Lee, Won-Jong | - |
dc.contributor.author | 남효진 | - |
dc.contributor.author | Nam, Hyo-Jin | - |
dc.date.accessioned | 2011-12-15T01:03:34Z | - |
dc.date.available | 2011-12-15T01:03:34Z | - |
dc.date.issued | 1998 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143454&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50216 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ v, 171 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 마이크로머시닝 | - |
dc.subject | 압전 | - |
dc.subject | 페롭스카이트 | - |
dc.subject | 스퍼터링 | - |
dc.subject | 미소기동기 | - |
dc.subject | Microactuator | - |
dc.subject | Micromachining | - |
dc.subject | Perovskite:Piezoelectric | - |
dc.subject | Sputtering | - |
dc.subject | PZT | - |
dc.title | 반응성 스퍼터링법에 의해 제조된 PZT 박막의 특성 평가와 압전형 미소기동기 제작에 관한 연구 | - |
dc.title.alternative | A study on the properties of PZT films prepared by reactive sputtering method and the fabrication of piezoelectric microactuator | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 143454/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000945141 | - |
dc.contributor.localauthor | 남효진 | - |
dc.contributor.localauthor | Nam, Hyo-Jin | - |
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