ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구 = Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputtering

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
113001/325007 / 000935050
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 136 p. ]

Keywords

Pt 기판; 활성화; ECR 프라즈마; PZT 박막; Lead zirconate titanate; Platinum substrate; Activation; ECR plasma; Sputtering

URI
http://hdl.handle.net/10203/50340
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113001&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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