학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iv, 71 p. ]
메쉬; 흡수계수; 투광성; 위상변이 마스크; 광학적인 성질; 마그네트론; 스퍼터링; 균일도; 산화물; 크롬; Cr; Transmittance; Absorbance; Mesh; Phase shifting mask; Band gap; Optical properties; Chromium oxide; Uniformity; Sputtering; Magnetron
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