Highly effective three-dimensional large-scale microfabrication using a continuous scanning method

Cited 29 time in webofscience Cited 0 time in scopus
  • Hit : 202
  • Download : 642
Effective scanning is an important issue in two-photon induced stereolithography (TPS) for the reduction of the processing time required to fabricate three-dimensional (3D) nano/microstructures. In large-scale TPS based on a stage-scanning system, the large processing time due to the intrinsic slow response in the stage scanning system is a major obstacle to its use as a practical nanofabrication process. To overcome this drawback, we propose a continuous scanning method (CSM) for a stage-scanning system. In CSM, a pattern is generated with continuous movement of the stage during laser beam exposure. A stable fabrication window (SFW), which enables uniform motion of the stage without errors considering the stage characteristics, was obtained from fundamental experiments. Within the condition of a SFW, 2D and 3D microstructures having nanoscale details were fabricated with a whole scale range of several hundred micrometers using CSM.
Publisher
SPRINGER
Issue Date
2008-08
Language
English
Article Type
Article; Proceedings Paper
Keywords

2-PHOTON POLYMERIZATION; FABRICATION; PHOTOPOLYMERIZATION

Citation

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.92, pp.541 - 545

ISSN
0947-8396
URI
http://hdl.handle.net/10203/18509
Appears in Collection
ME-Journal Papers(저널논문)PH-Journal Papers(저널논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 29 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0