We investigated the visible photon accelerated negative bias instability (NBI) in amorphous In-Ga-Zn-O (a-IGZO) thin film transistor (TFT). As reported in previous works, the rigid shift in transfer curves with insignificant changes in field-effect mobility and subthreshold swing was observed. On the other hand, there is substantial change in capacitance-voltage characteristics caused by created subgap states. The suggested nature of created states is the ionized oxygen vacancy (V(O)(2+)) by the combination of visible light and negative bias. The generated V(O)(2)+ states enhance the NBI under illumination as increased deep hole trapping centers. Furthermore, the photoexcitation of V(O) to stable V(O)(2+) yields excess free carriers in conduction band. The increased carrier density also enhances the negative shift in turn-on voltage of a-IGZO TFT. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3510471]