Iterative learning control applied to batch processes: An overview

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With the recent emphasis on batch processing by emerging industries like the microelectronics and biotechnology, the interest in batch process control has been renewed. This paper gives an overview of the iterative learning control (ILC) technique, which can be used to improve tracking control performance in batch processes. The fundamental concepts and review of the various ILC algorithms are presented, with a particular focus on a model-based algorithm called Q-ILC and an application involving a rapid thermal processing (RTP) system. The study indicates that one can solve a seemingly very difficult multivariable nonlinear tracking problem with relative case by intelligently combining the ILC technique with basic process insights and standard system identification techniques. Some related techniques in the literature are brought forth with the hope of unifying them. We aslo suggest some remaining challenges. (c) 2007 Elsevier Ltd. All rights reserved.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
2007-10
Language
English
Article Type
Article; Proceedings Paper
Keywords

MODEL-PREDICTIVE CONTROL; WAFER TEMPERATURE UNIFORMITY; REPETITIVE CONTROL; SYSTEM; CONVERGENCE; ALGORITHM

Citation

CONTROL ENGINEERING PRACTICE, v.15, no.10, pp.1306 - 1318

ISSN
0967-0661
DOI
10.1016/j.conengprac.2006.11.013
URI
http://hdl.handle.net/10203/92842
Appears in Collection
CBE-Journal Papers(저널논문)
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