강유전체 박막 증착을 위한 Pt 하부 전극 제조 및 응력 분석Fabrication and stress analysis of Pt bottom electrode for ferroelectric thin film
- Publisher
- 한국세라믹학회 추계학술대회
- Issue Date
- 2006-09
- Language
- Korean
- Citation
한국세라믹학회 추계학술대회 논문집
- ISSN
- 1229-7801
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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