강유전체 박막 증착을 위한 Pt 하부 전극 제조 및 응력 분석Fabrication and stress analysis of Pt bottom electrode for ferroelectric thin film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김지윤 | ko |
| dc.contributor.author | 김윤석 | ko |
| dc.contributor.author | Buhlmann, Simon | ko |
| dc.contributor.author | 홍승범 | ko |
| dc.contributor.author | 노광수 | ko |
| dc.date.accessioned | 2013-03-06T19:51:57Z | - |
| dc.date.available | 2013-03-06T19:51:57Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006-09 | - |
| dc.identifier.citation | 한국세라믹학회 추계학술대회 논문집 | - |
| dc.identifier.issn | 1229-7801 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/88232 | - |
| dc.language | Korean | - |
| dc.publisher | 한국세라믹학회 추계학술대회 | - |
| dc.title | 강유전체 박막 증착을 위한 Pt 하부 전극 제조 및 응력 분석 | - |
| dc.title.alternative | Fabrication and stress analysis of Pt bottom electrode for ferroelectric thin film | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.publicationname | 한국세라믹학회 추계학술대회 논문집 | - |
| dc.contributor.localauthor | 노광수 | - |
| dc.contributor.nonIdAuthor | 김지윤 | - |
| dc.contributor.nonIdAuthor | 김윤석 | - |
| dc.contributor.nonIdAuthor | Buhlmann, Simon | - |
| dc.contributor.nonIdAuthor | 홍승범 | - |
| dc.description.isOpenAccess | N | - |
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