Pb-free Sn/3.5Ag wafer-bumping process and UBM (under bump metallurgy) study

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This paper describes newly defined eutectic SnAg solder bumping process using an alloy electroplating method and the interface reactions between four different types of UBM (under bump metallurgy) layers and eutectic SnAg bumps. In addition, the bumping process and UBM reactions of eutectic SnAg were compared with those of eutectic PbSn which is most commonly used as a solder bumping material.
Publisher
SPRINGER-VERLAG
Issue Date
2002-01
Language
English
Article Type
Article; Proceedings Paper
Keywords

INTERFACIAL REACTIONS; EUTECTIC SNPB; SOLDERS; METALLIZATION

Citation

MICROSYSTEM TECHNOLOGIES, v.7, no.5-6, pp.269 - 272

ISSN
0946-7076
URI
http://hdl.handle.net/10203/83696
Appears in Collection
MS-Journal Papers(저널논문)
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