Optimization of depositing composite thin films by sputtering process

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Publisher
한국의학물리학회
Issue Date
2002
Language
Korean
Citation

의학물리, v.40, no.3, pp.511 - 515

ISSN
1226-5829
URI
http://hdl.handle.net/10203/78941
Appears in Collection
MS-Journal Papers(저널논문)
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