Optimization of depositing composite thin films by sputtering process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | m.farooq | ko |
| dc.contributor.author | Lee, Zin-Hyoung | ko |
| dc.date.accessioned | 2013-03-03T13:49:01Z | - |
| dc.date.available | 2013-03-03T13:49:01Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002 | - |
| dc.identifier.citation | 의학물리, v.40, no.3, pp.511 - 515 | - |
| dc.identifier.issn | 1226-5829 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/78941 | - |
| dc.language | Korean | - |
| dc.publisher | 한국의학물리학회 | - |
| dc.title | Optimization of depositing composite thin films by sputtering process | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 40 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 511 | - |
| dc.citation.endingpage | 515 | - |
| dc.citation.publicationname | 의학물리 | - |
| dc.contributor.localauthor | Lee, Zin-Hyoung | - |
| dc.contributor.nonIdAuthor | m.farooq | - |
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