HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY STUDY OF SOLID-PHASE CRYSTALLIZED SILICON THIN-FILMS ON SIO2 - CRYSTAL-GROWTH AND DEFECTS FORMATION
- Publisher
- AMER INST PHYSICS
- Issue Date
- 1995-01
- Language
- English
- Article Type
- Article
- Keywords
DEPOSITED AMORPHOUS-SILICON; POLYCRYSTALLINE SILICON; RECRYSTALLIZATION
- Citation
JOURNAL OF APPLIED PHYSICS, v.77, no.1, pp.95 - 102
- ISSN
- 0021-8979
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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