트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향Formation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching

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dc.contributor.author이주욱ko
dc.contributor.author김상기ko
dc.contributor.author김종대ko
dc.contributor.author구진근ko
dc.contributor.author이정용ko
dc.contributor.author남기수ko
dc.date.accessioned2013-03-02T13:31:39Z-
dc.date.available2013-03-02T13:31:39Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1998-12-
dc.identifier.citation한국재료학회지, v.8, no.7, pp.634 - 640-
dc.identifier.issn1225-0562-
dc.identifier.urihttp://hdl.handle.net/10203/73747-
dc.languageKorean-
dc.publisher한국재료학회-
dc.title트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향-
dc.title.alternativeFormation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume8-
dc.citation.issue7-
dc.citation.beginningpage634-
dc.citation.endingpage640-
dc.citation.publicationname한국재료학회지-
dc.contributor.localauthor이정용-
dc.contributor.nonIdAuthor이주욱-
dc.contributor.nonIdAuthor김상기-
dc.contributor.nonIdAuthor김종대-
dc.contributor.nonIdAuthor구진근-
dc.contributor.nonIdAuthor남기수-
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