트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향Formation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching
- Publisher
- 한국재료학회
- Issue Date
- 1998-12
- Language
- Korean
- Citation
한국재료학회지, v.8, no.7, pp.634 - 640
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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