트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향Formation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching

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Publisher
한국재료학회
Issue Date
1998-12
Language
Korean
Citation

한국재료학회지, v.8, no.7, pp.634 - 640

ISSN
1225-0562
URI
http://hdl.handle.net/10203/73747
Appears in Collection
MS-Journal Papers(저널논문)
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