Study on improved electron emission characteristics of micropatterned diamond-like carbon films

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Diamond-like carbon (DLC) films have been grown on silicon substrates by pulsed Nd-YAG laser ablation using an oscillating graphite target. Excellent field-emission characteristics of the DLC films micropatterned in 0.5 mu m spacing were obtained. When the columnar DLC structure was tested in a vertical direction, high area density of emission sites and good field-emission uniformity were observed. These findings indicate that the patterned and particle-filtered DLC film has a high potential as a cold cathode electron source for field-emission display. Also, the field-emission characteristics and electrical resistivity of the DLC film after annealing at high temperature is discussed together with the analysis of Raman spectroscopy. (C) 1999 American Vacuum Society. [S0734-211X(99)09302-6].
Publisher
AMER INST PHYSICS
Issue Date
1999-03
Language
English
Article Type
Article; Proceedings Paper
Keywords

LASER ABLATION

Citation

JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.17, no.2, pp.690 - 695

ISSN
1071-1023
URI
http://hdl.handle.net/10203/72050
Appears in Collection
MS-Journal Papers(저널논문)
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