DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, IH | ko |
dc.contributor.author | Lee, Taek Dong | ko |
dc.date.accessioned | 2013-02-28T01:29:53Z | - |
dc.date.available | 2013-02-28T01:29:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-03 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.17, no.2, pp.690 - 695 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | http://hdl.handle.net/10203/72050 | - |
dc.description.abstract | Diamond-like carbon (DLC) films have been grown on silicon substrates by pulsed Nd-YAG laser ablation using an oscillating graphite target. Excellent field-emission characteristics of the DLC films micropatterned in 0.5 mu m spacing were obtained. When the columnar DLC structure was tested in a vertical direction, high area density of emission sites and good field-emission uniformity were observed. These findings indicate that the patterned and particle-filtered DLC film has a high potential as a cold cathode electron source for field-emission display. Also, the field-emission characteristics and electrical resistivity of the DLC film after annealing at high temperature is discussed together with the analysis of Raman spectroscopy. (C) 1999 American Vacuum Society. [S0734-211X(99)09302-6]. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | LASER ABLATION | - |
dc.title | Study on improved electron emission characteristics of micropatterned diamond-like carbon films | - |
dc.type | Article | - |
dc.identifier.wosid | 000079759500083 | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 690 | - |
dc.citation.endingpage | 695 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE TECHNOLOGY B | - |
dc.contributor.localauthor | Lee, Taek Dong | - |
dc.contributor.nonIdAuthor | Shin, IH | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | LASER ABLATION | - |
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