Electron Cyclotron Resonance N2O- 플라즈마 산화를 이용한 열 산화막의 신뢰성 향상Reliability lmprovement of Thermal Oxide using Electron Cyclotron Resonance N2O-Plasma Oxidation
- Publisher
- 대한전기학회
- Issue Date
- 1998-08
- Language
- Korean
- Citation
전기학회논문지, pp.1221 - 1225
- ISSN
- 1975-8359
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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