Electron Cyclotron Resonance N2O- 플라즈마 산화를 이용한 열 산화막의 신뢰성 향상Reliability lmprovement of Thermal Oxide using Electron Cyclotron Resonance N2O-Plasma Oxidation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이진우 | ko |
| dc.contributor.author | 이내인 | ko |
| dc.contributor.author | 한철희 | ko |
| dc.date.accessioned | 2013-02-27T18:47:10Z | - |
| dc.date.available | 2013-02-27T18:47:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-08 | - |
| dc.identifier.citation | 전기학회논문지, pp.1221 - 1225 | - |
| dc.identifier.issn | 1975-8359 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/70191 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | Electron Cyclotron Resonance N2O- 플라즈마 산화를 이용한 열 산화막의 신뢰성 향상 | - |
| dc.title.alternative | Reliability lmprovement of Thermal Oxide using Electron Cyclotron Resonance N2O-Plasma Oxidation | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.beginningpage | 1221 | - |
| dc.citation.endingpage | 1225 | - |
| dc.citation.publicationname | 전기학회논문지 | - |
| dc.contributor.localauthor | 한철희 | - |
| dc.contributor.nonIdAuthor | 이진우 | - |
| dc.contributor.nonIdAuthor | 이내인 | - |
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