Theoretical composition calibration and thickness measurement in the analysis of multielement thin films using wavelength dispersive spectroscopy: application to PZT thin films
- Publisher
- Japan Soc Applied Physics
- Issue Date
- 1997-04
- Language
- English
- Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v.36, no.0, pp.1242 - 1245
- ISSN
- 0021-4922
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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