Theoretical composition calibration and thickness measurement in the analysis of multielement thin films using wavelength dispersive spectroscopy: application to PZT thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Won-Jong | ko |
| dc.date.accessioned | 2013-02-27T14:44:04Z | - |
| dc.date.available | 2013-02-27T14:44:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-04 | - |
| dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.36, no.0, pp.1242 - 1245 | - |
| dc.identifier.issn | 0021-4922 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/69150 | - |
| dc.language | English | - |
| dc.publisher | Japan Soc Applied Physics | - |
| dc.title | Theoretical composition calibration and thickness measurement in the analysis of multielement thin films using wavelength dispersive spectroscopy: application to PZT thin films | - |
| dc.type | Article | - |
| dc.identifier.scopusid | 2-s2.0-0031223374 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 36 | - |
| dc.citation.issue | 0 | - |
| dc.citation.beginningpage | 1242 | - |
| dc.citation.endingpage | 1245 | - |
| dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
| dc.subject.keywordAuthor | φ(ρz) | - |
| dc.subject.keywordAuthor | Film | - |
| dc.subject.keywordAuthor | PZT | - |
| dc.subject.keywordAuthor | WDS | - |
| dc.subject.keywordAuthor | ZAF | - |
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