Studies on Film Growth and Mechanical Properties of TiN by Chemical Vapor Deposition
- Publisher
- 한국요업학회
- Issue Date
- 1989
- Language
- Korean
- Citation
요업학회지, v.26, no.1, pp.21 - 30
- ISSN
- 1225-1372
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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