Studies on Film Growth and Mechanical Properties of TiN by Chemical Vapor Deposition

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dc.contributor.authorJ. S. Chunko
dc.date.accessioned2013-02-25T18:27:30Z-
dc.date.available2013-02-25T18:27:30Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1989-
dc.identifier.citation요업학회지, v.26, no.1, pp.21 - 30-
dc.identifier.issn1225-1372-
dc.identifier.urihttp://hdl.handle.net/10203/64317-
dc.languageKorean-
dc.publisher한국요업학회-
dc.titleStudies on Film Growth and Mechanical Properties of TiN by Chemical Vapor Deposition-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume26-
dc.citation.issue1-
dc.citation.beginningpage21-
dc.citation.endingpage30-
dc.citation.publicationname요업학회지-
dc.contributor.localauthorJ. S. Chun-
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