Studies on Film Growth and Mechanical Properties of TiN by Chemical Vapor Deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | J. S. Chun | ko |
| dc.date.accessioned | 2013-02-25T18:27:30Z | - |
| dc.date.available | 2013-02-25T18:27:30Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989 | - |
| dc.identifier.citation | 요업학회지, v.26, no.1, pp.21 - 30 | - |
| dc.identifier.issn | 1225-1372 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/64317 | - |
| dc.language | Korean | - |
| dc.publisher | 한국요업학회 | - |
| dc.title | Studies on Film Growth and Mechanical Properties of TiN by Chemical Vapor Deposition | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 26 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 21 | - |
| dc.citation.endingpage | 30 | - |
| dc.citation.publicationname | 요업학회지 | - |
| dc.contributor.localauthor | J. S. Chun | - |
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