Browse "PH-Conference Papers(학술회의논문)" by Author Seo, S
Showing results 1 to 3 of 3
| Development of Dual-Frequency Inductively Coupled Plasma and Control of Plasma Parameters Changing the Power Ratio between High-and Low-Frequency rf Sources Seo, S; Lee, H; Chang, Hong-Young, AVS 53rd International Symposium&Exhibition, AVS, 2006 |
| Effect of bounce resonance heating on electron energy distribution function Chung, C; Seo, S; Chang, Hong-Young, 52nd Annual Gaseous Electronic Conference, American Physical Society, 1999-10 |
| Evolution of the electron energy distribution function in planar inductive discharges using rare gases Seo, S; Kim, S; Hong, J; Chang, C; Chang, Hong-Young, 52nd Annual Gaseous Electronic Conference, American Physical Society, 1999-10 |
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