DSpace at KOASAS: Development of Dual-Frequency Inductively Coupled Plasma and Control of Plasma Parameters Changing the Power Ratio between High-and Low-Frequency rf Sources

DSpace at KOASAS

College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

Development of Dual-Frequency Inductively Coupled Plasma and Control of Plasma Parameters Changing the Power Ratio between High-and Low-Frequency rf Sources

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Seo, S / Lee, H / Chang, Hong-Young researcher

Publisher: AVS

Issue Date: 2006

Language: ENG

Citation: AVS 53rd International Symposium&Exhibition

URI: http://hdl.handle.net/10203/148319

Appears in Collection: PH-Conference Papers(학술회의논문)

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Development of Dual-Frequency Inductively Coupled Plasma and Control of Plasma Parameters Changing the Power Ratio between High-and Low-Frequency rf Sources

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