DSpace at KOASAS: Evolution of the electron energy distribution function in planar inductive discharges using rare gases

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

Evolution of the electron energy distribution function in planar inductive discharges using rare gases

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Seo, S / Kim, S / Hong, J / Chang, C / Chang, Hong-Young researcher

Publisher: American Physical Society

Issue Date: 1999-10

Language: ENG

Citation: 52nd Annual Gaseous Electronic Conference

URI: http://hdl.handle.net/10203/136344

Appears in Collection: PH-Conference Papers(학술회의논문)

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Evolution of the electron energy distribution function in planar inductive discharges using rare gases

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