DETERMINATION OF THE DENSITY-OF-STATES AT THE FERMI-LEVEL OF HYDROGENATED AMORPHOUS-SILICON IN THIN-FILM-TRANSISTOR STRUCTURE BY SPACE-CHARGE LIMITED CURRENT MEASUREMENT

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We studied the space charge limited current effect in hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs). We demonstrate that the drain current is space charge limited when the source-drain voltage is large and the gate voltage is small. Using this space charge limited current we determined the density of states in the gap of a-Si:H in a-Si:H TFT.
Publisher
Amer Inst Physics
Issue Date
1993
Language
English
Article Type
Article
Keywords

A-SI-H; DEPOSITION

Citation

APPLIED PHYSICS LETTERS, v.63, no.6, pp.779 - 781

ISSN
0003-6951
DOI
10.1063/1.109905
URI
http://hdl.handle.net/10203/61672
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