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Formation of TiSi2 thin films from chemical vapor deposition using TiI4 Rhee, Hwa Sung; Jang, Tae Woong; Baek, Jong Tae; Ahn, Byung Tae, Proceedings of the 1998 MRS Spring Symposium, pp.345 - 350, MRS, 1998-04-13 |
Pre-treatment effect on aluminum thin films deposition from CVD using dimethylethylamine alane Jang, Tae Woong; Rhee, Hwa Sung; Ahn, Byung Tae, Proceedings of the 1998 MRS Spring Symposium, pp.351 - 356, MRS, 1998-04-13 |
Thin film transistors fabricated with poly-Si films crystallized by microwave annealing Choi, Yong Woo; Lee, Jeong No; Jang, Tae Woong; Ahn, Byung Tae, Proceedings of the 1998 MRS Spring Symposium, pp.139 - 144, MRS, 1998-04-13 |
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