Pre-treatment effect on aluminum thin films deposition from CVD using dimethylethylamine alane

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 282
  • Download : 0
Issue Date
1998-04-13
Language
ENG
Citation

Proceedings of the 1998 MRS Spring Symposium, v.514, pp.351 - 356

ISSN
0272-9172
URI
http://hdl.handle.net/10203/118006
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0