Formation of TiSi2 thin films from chemical vapor deposition using TiI4

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Issue Date
1998-04-13
Language
ENG
Citation

Proceedings of the 1998 MRS Spring Symposium, v.514, pp.345 - 350

ISSN
0272-9172
URI
http://hdl.handle.net/10203/118225
Appears in Collection
MS-Conference Papers(학술회의논문)
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