Results 1-2 of 2 (Search time: 0.005 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment, Lee, JH; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58, 2004-03 | |
Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09 |