SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment,
A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment.
- Issue Date
- 2004-03
- Language
- English
- Article Type
- Article
- Keywords
SUPERVISORY CONTROL; CLUSTER TOOLS; DESIGN
- Citation
IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58
- ISSN
- 1070-9932
- Appears in Collection
- IE-Journal Papers(저널논문)
- Files in This Item
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