Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler
A Virtual Cluster Tool for Testing and Verifying a Cluster Tool Controller and a Scheduler.
- Issue Date
- 2004-09
- Language
- English
- Article Type
- Article
- Keywords
SYSTEMS; DESIGN
- Citation
IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49
- ISSN
- 1070-9932
- Appears in Collection
- IE-Journal Papers(저널논문)
- Files in This Item
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