Plasma Etching Antenna Effect on Oxide-Silicon Interface Reliability
- Publisher
- Pergamon-Elsevier Science Ltd
- Issue Date
- 1993-02
- Language
- English
- Article Type
- Note
- Keywords
DAMAGE
- Citation
SOLID-STATE ELECTRONICS, v.36, no.9, pp.1356 - 1358
- ISSN
- 0038-1101
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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