The Effects of Deposition Variables on the Electrical Properties of Silicon Nitride by CVD
- Publisher
- American Institute of Physics
- Issue Date
- 1986
- Language
- English
- Citation
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, v.6, pp.3082
- ISSN
- 0734-2101
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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