The Effects of Deposition Variables on the Electrical Properties of Silicon Nitride by CVD

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Publisher
American Institute of Physics
Issue Date
1986
Language
English
Citation

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, v.6, pp.3082

ISSN
0734-2101
URI
http://hdl.handle.net/10203/57013
Appears in Collection
RIMS Journal Papers
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