Nucleation and Growth of Aluminum Oxide on Silicon in the CVD Process
- Publisher
- Springer
- Issue Date
- 1987
- Language
- English
- Citation
JOURNAL OF MATERIALS SCIENCE, v.22, pp.1051 - 1056
- ISSN
- 0022-2461
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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