Nucleation and Growth of Aluminum Oxide on Silicon in the CVD Process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, Sung Woo | ko |
| dc.contributor.author | Kim, Chul | ko |
| dc.contributor.author | Kim, Jae Gon | ko |
| dc.contributor.author | Chun , Soung Soon | ko |
| dc.date.accessioned | 2013-02-24T11:08:49Z | - |
| dc.date.available | 2013-02-24T11:08:49Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1987 | - |
| dc.identifier.citation | JOURNAL OF MATERIALS SCIENCE, v.22, pp.1051 - 1056 | - |
| dc.identifier.issn | 0022-2461 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/56718 | - |
| dc.language | English | - |
| dc.publisher | Springer | - |
| dc.title | Nucleation and Growth of Aluminum Oxide on Silicon in the CVD Process | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 22 | - |
| dc.citation.beginningpage | 1051 | - |
| dc.citation.endingpage | 1056 | - |
| dc.citation.publicationname | JOURNAL OF MATERIALS SCIENCE | - |
| dc.contributor.localauthor | Chun , Soung Soon | - |
| dc.contributor.nonIdAuthor | Choi, Sung Woo | - |
| dc.contributor.nonIdAuthor | Kim, Chul | - |
| dc.contributor.nonIdAuthor | Kim, Jae Gon | - |
| dc.description.isOpenAccess | N | - |
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.