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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Theses_Master(석사논문)

급속 열처리시 실리콘 웨이퍼에 발생하는 슬립 현상의 해석Analysis of thermal stress-induced slip in silicon wafer during rapid thermal processing

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이혁 / Lee, Hyouk
Advisors
엄윤용researcher; Earmme, Youn-Youngresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
67479/325007 / 000881386
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1990.2, [ v, 46 p. ]

URI
http://hdl.handle.net/10203/46940
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67479&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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