급속 열처리시 실리콘 웨이퍼에 발생하는 슬립 현상의 해석Analysis of thermal stress-induced slip in silicon wafer during rapid thermal processing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 엄윤용 | - |
| dc.contributor.advisor | Earmme, Youn-Young | - |
| dc.contributor.author | 이혁 | - |
| dc.contributor.author | Lee, Hyouk | - |
| dc.date.accessioned | 2011-12-14T07:04:12Z | - |
| dc.date.available | 2011-12-14T07:04:12Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67479&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/46940 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1990.2, [ v, 46 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 급속 열처리시 실리콘 웨이퍼에 발생하는 슬립 현상의 해석 | - |
| dc.title.alternative | Analysis of thermal stress-induced slip in silicon wafer during rapid thermal processing | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67479/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000881386 | - |
| dc.contributor.localauthor | 엄윤용 | - |
| dc.contributor.localauthor | Earmme, Youn-Young | - |
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- ME-Theses_Master(석사논문)
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