초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발Development of 6 degrees-of-freedom micro stage for ultraprecision positioning
- Advisors
- 곽윤근researcher; Kwak, Yoon-Keunresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 105404/325007 / 000943041
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ iii, 46 p. ]
- Keywords
초정밀 운동; 압전소자; 마이크로 스테이지; 6자유도; 병렬 링크 구조; Piezoelectric element; Parallel link mechanism; Micro stage; Micro motion; 6 DOF
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.