초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발Development of 6 degrees-of-freedom micro stage for ultraprecision positioning
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 곽윤근 | - |
| dc.contributor.advisor | Kwak, Yoon-Keun | - |
| dc.contributor.author | 김경찬 | - |
| dc.contributor.author | Kim, Kyeong-Chan | - |
| dc.date.accessioned | 2011-12-14T06:57:28Z | - |
| dc.date.available | 2011-12-14T06:57:28Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105404&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/46506 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ iii, 46 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 초정밀 운동 | - |
| dc.subject | 압전소자 | - |
| dc.subject | 마이크로 스테이지 | - |
| dc.subject | 6자유도 | - |
| dc.subject | 병렬 링크 구조 | - |
| dc.subject | Piezoelectric element | - |
| dc.subject | Parallel link mechanism | - |
| dc.subject | Micro stage | - |
| dc.subject | Micro motion | - |
| dc.subject | 6 DOF | - |
| dc.title | 초정밀 작업을 위한 6자유도 마이크로 스테이지의 개발 | - |
| dc.title.alternative | Development of 6 degrees-of-freedom micro stage for ultraprecision positioning | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 105404/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000943041 | - |
| dc.contributor.localauthor | 곽윤근 | - |
| dc.contributor.localauthor | Kwak, Yoon-Keun | - |
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