미소 기전 시스템용 니켈 박막의 기계적 물성 측정 = Measurement of mechanical properties of electroplated nickel thin film for MEMS application

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Advisors
이순복researcherLee, Soon-Bokresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2003
Identifier
180105/325007 / 020013270
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ vii, 70 p. ]

Keywords

나노인덴터; 니켈; 전기도금; 기계적 성질; 미소 기전 시스템; MEMS; nano indenter; nickel; electro plated; mechanical properties

URI
http://hdl.handle.net/10203/45412
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180105&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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