미소 기전 시스템용 니켈 박막의 기계적 물성 측정Measurement of mechanical properties of electroplated nickel thin film for MEMS application
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이순복 | - |
| dc.contributor.advisor | Lee, Soon-Bok | - |
| dc.contributor.author | 백동천 | - |
| dc.contributor.author | Baek, Dong-Cheon | - |
| dc.date.accessioned | 2011-12-14T06:40:08Z | - |
| dc.date.available | 2011-12-14T06:40:08Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180105&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45412 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ vii, 70 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 나노인덴터 | - |
| dc.subject | 니켈 | - |
| dc.subject | 전기도금 | - |
| dc.subject | 기계적 성질 | - |
| dc.subject | 미소 기전 시스템 | - |
| dc.subject | MEMS | - |
| dc.subject | nano indenter | - |
| dc.subject | nickel | - |
| dc.subject | electro plated | - |
| dc.subject | mechanical properties | - |
| dc.title | 미소 기전 시스템용 니켈 박막의 기계적 물성 측정 | - |
| dc.title.alternative | Measurement of mechanical properties of electroplated nickel thin film for MEMS application | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180105/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 020013270 | - |
| dc.contributor.localauthor | 백동천 | - |
| dc.contributor.localauthor | Baek, Dong-Cheon | - |
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- ME-Theses_Master(석사논문)
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