Nonvolatile memory device and cross point array device including the same하프늄옥사이드 기반 반강유전체를 이용한 비휘발성 메모리 소자

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Provided is a nonvolatile memory device including a lower electrode on a substrate, an upper electrode on the lower electrode, a tunnel barrier pattern between the lower electrode and the upper electrode, and a fixed charge pattern in contact with the lower electrode and spaced apart from the tunnel barrier pattern with the lower electrode therebetween. The tunnel barrier pattern includes an anti-ferroelectric material. The lower electrode includes a first material. The upper electrode includes a second material. The first material and the second material have different work functions.
Assignee
KAIST
Country
US (United States)
Application Date
2021-05-17
Application Number
17321814
Registration Date
2023-08-15
Registration Number
11729992
URI
http://hdl.handle.net/10203/319502
Appears in Collection
EE-Patent(특허)
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