Investigation on TiOx/Ti/TiOx tri-layer film for integrated optical gas sensing applications
We systematically investigated the electrical characteristics of TiOx/Ti/TiOx tri-layer film for optical gas sensors on Ge-on-insulator platform. It was found that noise-equivalenttemperature-difference, which is strongly associated with limit-of-detection of gas sensors, could reach 14.56 mK.
- Publisher
- Optical Society of America
- Issue Date
- 2021-07
- Language
- English
- Citation
OSA Optical Sensors and Sensing Congress 2021
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.